Technique
Technical complex
Film Microheaters
Semiconductor gas sensors
Thermocatalytic gas sensors
Thermoanemometers
Gas test equipment
Film Microheaters.
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The basis for the proposed measuring elements is film microheater. This heating element represents construction - a thin membrane from polycrystalline aluminum oxide is glued on the massive ceramic base with a hole in the middle. Membrane thickness is 10-50 microns. The thickness of the thickest part of the base is equal to 0.65 mm. The size of the unit element is 6×6 mm. A ceramic plate, 48×60 mm size, with holes and saw cuts (see Fig), is used in all the preliminary stages of the technological process. Base material is radioceramics ADS-96R (in Russia BK-96). Cuts are designed to make it easy to break up plates on single chips. |
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A heater and the all necessary additional elements (compensation resistance, current leads, contact areas) is deposited by using vacuum deposition material (usually it is platinum) on manufacturing basis. |
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Ready ceramic plate breaks up into individual workpieces, which are used in the manufacturing of gas sensors sensitive elements. From the substrate, size of 48×60 mm, can be obtained up to 75 chips of size 6×6 mm. Proposed microhotplates are good prefabricated for manufacturing of various sensing devices, such as gas concentration sensors, pressure gauges, gas flow detectors, fast-acting thermometers, barretters. |
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