Technique
Technical complex
Film Microheaters
Semiconductor gas sensors
Thermocatalytic gas sensors
Thermoanemometers
Gas test equipment
Thermocatalytic gas sensors.
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We have developed the complex technological operations, which allows to produce sensing elements for high-speed thermocatalytic gas sensors. The measuring elements, manufactured by using the proposed film microheater, have low power expenditure, high sensitivity, reliability and longevity. Using them in corresponding electronics devices make it possible to keep temperature of catalytic films on the given level with high precision. It makes it possible to avoid autocatalysis. Sensors, produced on the film microhotplate base, are able to work after the attack of high concentrated detected gas. |
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TAF-sensors withstand high dynamic loads. Tests of the film platinum heaters have shown their stability, both at constant and pulsed heating. The semiconductor TAF-sensors allow to produce reliable, high-speed, efficient and inexpensive devices. These devices can measure concentrations not only flammable gases (methane, propane, hydrogen, etc.) but a vapors of organic solvents (alcohols, ketones, aldehydes, etc.). Made in small lots, our sensors are successfully tested in several research centers in our country and abroad. |
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The main characteristics of thermocatalytic thin-film measuring element.
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TAF-sensor (thermocatalytic) |
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Power consumption at simple heating up to 450°C, mW |
70 |
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Substrate material |
TAF-alumina film |
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Substrate material thickness, mm |
10 - 50 |
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Heater thermal response time, ms |
50 |
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Heater resistance (at room temperature), W |
10 - 30 |
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Heater resistance drift, % a year |
< 2 |
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Heater stability at pulsed measurements (20®450®20°C), number of cycles |
not less - 5×106 |
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Chip sizes, mm2 |
6 õ 6 |
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Hot spot sizes, mm2 |
300 õ 300 |
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Heater material |
Pt |
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Range of analyzed gas concentration measurement, % |
0.1 — 2.0 |